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Electron Beam Induced Nanometer Scale Deposition

By: Natalia Silvis-Cividjian
July 2002
Delft University
ISBN: 90-407-2289-7
286 pages, Illustrated, 6 3/8 x 9 1/2"
$67.50 paper original

The contents of this doctoral dissertation include: Electron beam induced deposition, Theory of EBID spatial resolution, role of secondary electrons in EBID, delocalization effects in EBID, experimental setup for EBID and IBID study, Nanometer scale fabrication with EBID, Summary and Conclusions.