Return to Coronet Books main page

Galvanic Etching of Silicon
For Fabrication of Micromechanical Structures

By Colin Ashruf
December 2000
Delft University Press
ISBN: 90-407-2001-0
157 pages, illustrated
$54.00 paper original

Ph.D. thesis. Contents include: Introduction. Bulk micromachining with alkaline solutions. Bulk micromachining with hydrofluoric acid solutions. Galvanic etching in TMAH solutions. Galvanic etching in HF solutions. Applications. Conclusions. Bibliography. Summary.

Electrical Engineering