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Galvanic Etching of Silicon
For Fabrication of Micromechanical Structures
By Colin Ashruf
December 2000
Delft University Press
ISBN: 90-407-2001-0
157 pages, illustrated
$54.00 paper original
Ph.D. thesis. Contents include: Introduction. Bulk micromachining with alkaline solutions. Bulk micromachining with hydrofluoric acid solutions. Galvanic etching in TMAH solutions. Galvanic etching in HF solutions. Applications. Conclusions. Bibliography. Summary.
