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Multi-anode Linear SDDs for High-Resolution X-ray Spectroscopy
Charge Confinement & Integration of Read-Out Electronics

By Jan Sonsky
July 2002
Delft University
ISBN: 90-407-2304-4
203 pages, Illustrated, 6 3/8 x 9 1/2"
$54.00 paper original

This dissertation describes the development of a special type of silicon detector for 1D-position sensitive X-ray spectroscopy, the multi-anode silicon drift detector (SDD). The SDDs feature very small capacitance, which is independent on the detector size. The ultimate energy resolution spectroscopy can be performed with large SDDs at a relatively fast signal shaping. Indeed a multi-anode linear configuration allows 1D- (or 2D-) position measurements. The development of a large multi-anode linear SDD for 1D position dependent spectroscopy of soft X-rays has to deal with two key issues: the position dependent loss of charge to adjacent anode pixels and the integration of the front-end p-JFET on the detector chip. The former one is solved by means of the sawtooth concept. The latter issue is realized by detector-electronics compatible process, the SMART700 degree process. The investigations of SDD processing aiming at a small leakage current at high processing temperatures are presented as well.