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A Thermal Accelerometer

By Ulrike Anna Dauderstädt
Nov. 1999 (Delft University Press)
ISBN: 90-407-1885-7
156 p.
$47.00 Paper Original


This book describes the theory, design, fabrication and performance of a new silicon accelerometer. This sensor converts the heat flow between a heat source and a suspended mass into a temperature change, which is detected by polysilicon-aluminum thermopiles.

Electronics